Contract awards & public grants
Pilot Integration of 3nm Semiconducter technology → KLA-Tencor MIE GmbH
European Commission · DE · Grant · 2019-05-13
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300mm Pilot Line for Smart Power and Power Discretes → KLA-Tencor MIE GmbH
European Commission · DE · Grant · 2017-05-15
€276,250
Seven Nanometer Technology → KLA-Tencor MIE GmbH
European Commission · DE · Grant · 2015-08-27
€182,704
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